JPH0247156U - - Google Patents
Info
- Publication number
- JPH0247156U JPH0247156U JP12628988U JP12628988U JPH0247156U JP H0247156 U JPH0247156 U JP H0247156U JP 12628988 U JP12628988 U JP 12628988U JP 12628988 U JP12628988 U JP 12628988U JP H0247156 U JPH0247156 U JP H0247156U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- polishing
- surface plate
- storage hole
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 12
- 239000003082 abrasive agent Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004744 fabric Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12628988U JPH0247156U (en]) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12628988U JPH0247156U (en]) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0247156U true JPH0247156U (en]) | 1990-03-30 |
Family
ID=31377680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12628988U Pending JPH0247156U (en]) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247156U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61230852A (ja) * | 1985-04-08 | 1986-10-15 | ロ−デル・インコ−ポレイテツド | 両面研磨作業のためのキヤリア組立体 |
-
1988
- 1988-09-29 JP JP12628988U patent/JPH0247156U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61230852A (ja) * | 1985-04-08 | 1986-10-15 | ロ−デル・インコ−ポレイテツド | 両面研磨作業のためのキヤリア組立体 |